Meridian Semiconductor has formally approved an $18.4 billion capital expenditure plan to construct Fab 12, a dedicated 1.8-nanometer extreme ultraviolet (EUV) production facility in Taichung Science Park.

The investment, confirmed by two board members with direct knowledge of the vote, represents the largest single semiconductor manufacturing commitment in the region since 2022. Groundbreaking is scheduled for October, with commercial wafer output targeted for the third quarter of 2028.

High-NA Tooling and Power Infrastructure

The new fab will house eight High-NA EUV lithography scanners. To support the site's estimated 240-megawatt peak load, municipal utility operators have committed to constructing a dedicated high-voltage substation paired with 600MWh of on-site battery storage.

"Customer demand for sub-2nm silicon with custom packaging interconnects has outstripped our existing cleanroom floor plans by more than 160 percent."

— Meridian Executive Briefing

Meridian shares gained 3.8% in early trading, lifting suppliers across the lithography chemical and automated handling sectors.